Tiziana Lepidi wrote:
> i have problems with SU-8 photoresist. in particular i don't have idea
> to spin the photoresist on the silicon subtrate without form bubbles. Do
> you Know how to apply this photoresist avoiding this problem and have a
> uniform layer of photoresist?
> Thanks Vanessa la Cecilia
> Dr. Vanessa la Cecilia
> e-mail: [email protected] or [email protected]
> tel. +393388424257
>
>
Dear Dr. Cecilia,
I have the same problem as yours. Furthermore, sometimes I got several
basin
area instead of bubbles.
Could you share the information with me once you get the answers?
Thank you!
Sincerely,
Bernard Hao-Chih Liu
Rapid Prototyping Lab
Stanford University
www-rpl.stanford.edu