Dear collegues,
I am working in the field of integrated planar waveguide optics in
polymers. For a new project I am thinking of integrating blazed
gratings with a grating period of 500 nm to 1.5 µm (sawtooth
shaped etching edge) in the planar waveguide.
I got now 2 questions
1) can anyone help me out with references and or experiences
concerning planar waveguide gratings?
2) has anyone experience in photolithographically (PR AZ5214?)
structuring 1.5µm sawtooths (or sth. comparable) on for example
polymers?
Thank you very much in advance!
Yours Regina Grote
________________________________________________________________________
Dipl.-Ing. Regina Grote e-mail:[email protected],
AG Integrierte Optoelektronik tel: +49-(0)631-205-4149
Universitaet Kaiserslautern fax: +49-(0)631-205-4147
Erwin-Schroedinger-Str 46, 67653 Kaiserslautern, Germany