I believe TI has developed some of these coatings a few years
        ago to remove the sticking of their micromirrors.

                                                Carlos M.

On Tue, 19 Oct 1999, Yan Loke wrote:

>
>       A paper published in Tranducers 99 reported a vapour phase
>       anti stiction coating process.  This was done in the Tokyo
>       Central Research and Development Labs. Inc.
>
>       Does anyone know of the same work being done in North America?
>
>       Regards
>       Yan
>
>       yloke@omminc.com
>
>