I am very interested in purchasing a super critical dry apparatus to
release cantilever beams and other structures associated with MEMS devices.
I have spoken with two companies who make an apparatus that could be used
for this but the chamber for each could only hold a 1" by 1" sample. These
two machines had a price tag of approximately 6K. I did find a third
company who made the apparatus specially for this purpose. It was fully
automated and could hold a 6" wafer. Unfortunately, it had a price tag of
85K. Does anyone know of a company that has developed a super critical dry
release apparatus that can hold at least a 3" wafer and under 20K? If not
any information on places that make this piece of equipment would be very
much appreciated.

Thank you,

        Max  Scardelletti
        NASA GRC
        [email protected]