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MEMSnet Home: MEMS-Talk: Etching of Si3N4
Etching of Si3N4
1999-11-08
Abmi
Etching of Si3N4
Abmi
1999-11-08
Hello,

I was wondering about how to etch out Si3N4
chemically? I want to remove some part of
Si3N4 from a structure of Si3N4(100nm)/SiO2
(30nm). Thanking you

Abmi


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