MEMaterial will show how to vary process parameters and see its impact on
material properties (such as refreactive index) on various films (such as
silicon nitride or silicon oxide). We have a lot of data on refractive index of
thin films. This may be an alternative to implant process.

Let us know if you are interested and we will send you info.

Sincerely,
Fariborz Maseeh
IntelliSense Corporation
16 Upton Drive
Wilmington, MA 01887
(508) 988 - 8000
(508) 988 - 8001 fax