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MEMSnet Home: MEMS-Talk: Wanted: Mechanical Properties of SiC, Si, GaN
Wanted: Mechanical Properties of SiC, Si, GaN
1999-11-22
Peter Gluche
Wanted: Mechanical Properties of SiC, Si, GaN
Peter Gluche
1999-11-22
Hi there,

has anybody data about the young´s modulus and fracture strength of the
following materials: 3C-SiC, 4H-SiC, 6H-SiC, GaN, (100)-Si? Any data
wether from deposited film or bulk materials will be helpful.


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