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MEMSnet Home: MEMS-Talk: Ion-beam sputtering
Ion-beam sputtering
1999-12-07
Michael Whitley
Ion-beam sputtering
Michael Whitley
1999-12-07
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Hi,

I'm searching for a vendor for ion-beam reactively sputtered silicon =
nitride and silicon dioxide on 4 inch wafers.  These films will be used =
in a lift-off process.  Any help will be appreciated.

Thanks!

Michael Whitley
MEMS Optical, LLC
[email protected]
256-859-1886 (voice)
256-859-5890 (fax)


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Hi,
 
I'm searching for a vendor for ion-beam = reactively=20 sputtered silicon nitride and silicon dioxide on 4 inch wafers.  = These=20 films will be used in a lift-off process.  Any help will be=20 appreciated.
 
Thanks!
 
Michael Whitley
MEMS Optical, LLC
[email protected]
256-859-1886 (voice)
256-859-5890 (fax)
 
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