Have you checked with a place called "The Source" out here in Silicon Valley?
If you have 100K does that mean you have other money for facilities. I would
think an older Applied tool (real old) or any of a number of furnace makers
would do. Another place that could point you in the right direction is a 2nd
market reseller/refurber named Comdisco-they have a semiconductor equipment
group. My last thought would be to call a foundry company, such as one called
silicaTek in tempe,AZ-their business requires them to stock their small fab
with tools capable of multi-purpose applciaitonson an economical basis-they
would have some ideas of good sources.

Good Luck
John Field
[email protected]  (I  used to work in the front end cap equip sector,
Applied,Lam ,etc.)