We have done this before by using nitride as the membrane. What kind of
help do you need?

Liwei Lin
>Hello,
>I'm looking for a method to produce circular membranes etched
>from Si. The membrane itself can be made of any material eg
>Si3N4 or SiO2 or Si itself. Can anyone help?
>
>Thanking you in advance
>
>Phil Rayner
>