Hi everyone!

Can anyone out there tell me a bit about endpoint detection systems for
Reactive Ion Etchers?  What different types there are, how they work, what
situations they are optimal for, and  approximate price ranges?   I
was told to write up a summary within the week regarding the possibility of
either attaching one to our existing RIE (PlasmaTherm Batchtop) or getting
another.  (Wow!  They actually came to me and offered to buy stuff, instead
of me having to beg!!!   Either I'm doing stuff really right, or really
wrong!)

Much thanks in advance,

Marisa Ahmad
R&D Specialist
mahmad@semiconductor.com

"It's not how hard you fall, it's how high you bounce."