Make a capacitor out of it and measure the capacitance. A small disk
should work just be sure your disk is smaller than the masked area you
are measuring so the edge effects are the same every time.

Gordon

Gordon Couger gcouger@couger.com
Owner PRAG-L PRactical AGriculture List  www.couger.com/prag-l
Stillwater, OK        405 624-2855   GMT -6:00
-----Original Message-----
From: Ramadas, Padmaja 
To: MEMS@ISI.EDU 
Date: Saturday, January 23, 1999 7:58 PM
Subject: Equipment for measuring thick polymers


>I am looking for equipments that can measure thick resist more than 30 um
upto 100um or more on silicon wafers. I would appreciate any directions I
can have on it.
>
>Thank you,
>
>Regards,
>
>Padmaja
>
>
>