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MEMSnet Home: MEMS-Talk: Re: endpoint detection for RIE's
Re: endpoint detection for RIE's
1999-01-24
[email protected]
Re: endpoint detection for RIE's
[email protected]
1999-01-24
The simplest are optical systems based on looking at a single sampling, say
512 nm for CO. Xenix used to be in this business, not sure if hey are anymore.
Try calling Tegal, they will know what the market has these days. Or aplace
called Raines Technology in phoenix (they rebuild old Tegal stuff).

J Field


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