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MEMSnet Home: MEMS-Talk: Re: Epson SU-8 photoresist
Re: Epson SU-8 photoresist
1999-01-26
Shivalik Bakshi
1999-01-26
Greg Cibuzar
Re: Epson SU-8 photoresist
Shivalik Bakshi
1999-01-26
Hi Chelly,

What exactly do you mean by erosion of the PR?

Also, what etchant are you using? HF?

Shivalik


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