Wyko makes an instrument based on interference technique that might be
able to measure the deflection.  However, it is very expensive.  I would
recommend that you talk to someone in your physics or optics departments
about an inexpensive interferometric measurement scheme.  I know that
with an optics bench and a few thousand dollars worth of components a
very accurate system can be set up.  The Wyko instrument is used by the
semiconductor industry and works very well but is a general purpose
instrument where user-friendliness is more important.  I think you could
make an excellent system for your special-purpose needs for <$5K, and
you might even be able to do it for free by collaborating with a
well-equipped optics lab.

Thor Osborn, Ph.D.
Manager, MEMS Processing
Microvision, Inc.
2203 Airport Way South, Suite 100
Seattle, Washington 98134

TEL.    (206) 623-7055
FAX     (206) 467-8120


-----Original Message-----
From: LI LI [mailto:[email protected]]
Sent: Wednesday, January 20, 1999 2:19 PM
To: [email protected]
Subject: deflection measurent under a load


Does anyone know where I can find an instrument that can measure a 15
micrometers deflection of a MEMS structure with a load in mili-Newton
range? The sample is a doubly supported beam which is 200 micrometers
long
and 100 micrometers wide and 10 micrometers thick.
Thanks in advance.



----------------------------
Li Li
Dept. Mechanical Engineering
University of Arkansas
Fayetteville, AR 72701
Tel: 501-521-9890
Fax: 501-575-6982
E-mail: [email protected]
----------------------------