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MEMSnet Home: MEMS-Talk: reactive sputtering of Ir
reactive sputtering of Ir
1995-12-22
wasmus@uni-muenster.de
reactive sputtering of Ir
wasmus@uni-muenster.de
1995-12-22
Send reply to mems@isi.edu
Hi there,

I am looking for information about reactive-sputtering of Iridium in an oxygen
atmosphere. Espacially information about running that process would be
helpfull. Since we are also searching for a second-hand sputtering unit,
related offers are welcome too.

Thank's for reading the request, have a merry christmas and a happy 1996

Otto Wassmus


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