Any company which makes photo-stencils for printed circuit boards (ie metal
masks similar to silk screens) should be able to do this for you.  Chemical,
laser and hybrid etched screens on any of several metal substrates are
readily available.

I don't know companies in Sweden, but if you can't find one you could try
Photostencil Inc. in Colorado Springs, Colorado, 1-719-599-4305, or fax
1-719-599-4334.

As for making your own, have you tried etching cavities from the back side
of your silicon wafer that are slightly larger than your features, leaving
membranes of 50 microns or so.  Then finish the stencil by laser, chemical
or RIE etching the features from the front side.  This should prove much
more robust.

On a side note, I hear that Electronic Visions Inc. now sells a machine
based on their aligner bonders that is designed specifically to align and
temporarily affix shadow masks to silicon wafers.  Their web site is
http://www.elvisions.com .

Good luck,

--
Marc Straub
Advanced Technology Development, Visteon Automotive Systems
Ford Motor Company
Dearborn, Michigan  USA

-----Original Message-----
From: WLODEK KAPLAN -1023 [mailto:wlodek@imc.kth.se]
Sent: Thursday, February 04, 1999 3:25 AM
To: MEMS@ISI.EDU
Subject: shadow masks


Hello,

We are using shadow contact masks made of Si for one of the
metalization processes. They are fabricated by cutting holes wih
laser in thin silicon wafers, so they can be very easily damaged
during the alignment procedure. The alternative substrate for mask
fabrication would be metal but the problem is the flatness of the
mask after fabrication because we need around 100 holes on 100 mm
wafer.

Does anyone have experience with shadow masks and/or know the
supplier of shadow masks made of metal?

Wlodek Kaplan

*