I'm looking for a supplier of electroplating equipment/set up for
plating MEMS devices, for single wafers (3 and 4 inch). I did a web
search adn didn't come across anything too useful. So, I'm asking. We
are going to do Ni, permalloy, and photoresist layers.

  If nothing exists, could someone point me the direction of a good
reference or name of a group that has a set up that works well.

  Thank you,

    Ken Westra
    Manager/Staff Scientist
    MicroFab at the University of Alberta
    [email protected]