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SU-8 data
1999-02-10
Franck CHOLLET
SU-8 data
Franck CHOLLET
1999-02-10
Dear MEMS companions,
the thick photoresist SU-8 is becoming more and more important to the MEMS
community. However its use is far from easy, and standard photolythographic
process have to be substantially adapted.
To help beginners and others, a database on the subject, mixing literature
reference and experimental ones seems a good idea (a SU-8 FAQ in fact, that
surely rejoins the recent appeal for more information *exchange* in the
community :-). But it needs your help.
Those over there who possess data on the resist (ANY data: process data,
physical properties, characterisation results...), please send them to me,
and they will be included on a webpage with credits, of course.
Moreover, if you have already made a webpage on the subject, give me its
address and I will link it from the page.
The data already collected may be found at:
http://aveclafaux.freeservers.com/SU-8.html#top
As you may see it is just a beginning, but it will grow with your help!

Thank you,
Franck


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