A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: interferometers
interferometers
1999-02-11
John Neumann
interferometers
John Neumann
1999-02-11
Does anyone know if there is a type of interferometer that would
interface to an existing microscope? We have a porbe station we
like, and it would be useful to measure z-direction vibrations at
various points on the structures we look at.

Thanks,
--

%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%

Dr. John Neumann
Postdoctoral Researcher, ECE Dept.
Micro-electro-mechanical Systems (MEMS)
1209 Hamerschlag Hall
Carnegie Mellon University
Pittsburgh, PA 15213-3890

[email protected]
phone: (412) 268-4404
FAX: (412) 268-2860


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
The Branford Group
MEMS Technology Review
Process Variations in Microsystems Manufacturing
University Wafer