and <111>


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Hi everyone,
I am currently doing research in laser etching of semiconductors using
fluorocarbons and I was wondering if anybody could give me information
on where to find thermal desorption spectra of fluorocarbons, especially
trifluoromethane on Silicon <100> and <111>.

Regards,

Chris O'Driscoll

--
Chris O'Driscoll
Advanced Materials and Technologies Group,
National Microelectronic Research Centre,
Lee Maltings, Prospect Row,
Cork, Ireland.

Phone: +353-21-904112
Fax:   +353-21-270271
email: [email protected]
http://www.nmrc.ucc.ie



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Hi everyone,

I am currently doing research in laser etching of semiconductors using
fluorocarbons and I was wondering if anybody could give me information
on where to find thermal desorption spectra of fluorocarbons, especially
trifluoromethane on Silicon <100> and <111>.
Regards,
Chris O'Driscoll
-- 
Chris O'Driscoll
Advanced Materials and Technologies Group,
National Microelectronic Research Centre,
Lee Maltings, Prospect Row,
Cork, Ireland.

Phone: +353-21-904112
Fax:   +353-21-270271
email: [email protected]
http://www.nmrc.ucc.ie
 

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