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MEMSnet Home: MEMS-Talk: 6" SiN/Si wafers
6" SiN/Si wafers
1999-02-15
bchen@atmi.com
6" SiN/Si wafers
bchen@atmi.com
1999-02-15
We're looking for a source to acquire 6-inch low-stress nitride coated
silicon wafers.  Wafer size has to be 6 inch. The quantity we're looking at
is a box of 25 wafers, and may be less depending on the pricing. Per wafer
basis would be ideal. I'll compile a list of responses and post it to the
group later.

Barry Chen, Sr. Research Engineer
ATMI


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