Hello,

We are developing MEMS devices and we are planning to buy a system for
deep silicon etching. The most interesting systems are based on Bosch
process.  Can someone tell his/her experiences of different systems
(Plasma-Therm, Alcatel, STS, Oxford)? Has anybody compared different
systems?  For example reliability of systems, repeatability of process etc.
Any comments are welcome.

Thank you,

Jani Karttunen
Email: [email protected]