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MEMSnet Home: MEMS-Talk: Pt in the fab
Pt in the fab
1999-01-20
Dan W Chilcott
Pt in the fab
Dan W Chilcott
1999-01-20
I am looking for information about the use of Platinum in a fab.  Is
anybody currently using Platinum in their fab?  If so,  what precautions
are taken to eliminate contamination issues.  We have a running debate
about the potential danger of contamination from Platinum and we could use
some industry advice.

Dan Chilcott
MEMS Development
Delphi Delco Automotive Systems


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