Dear MEMS group,
We would like to do some Xenon Diflouride etching on silicon. Before we
build an etching station from scratch, I wonder if anyone knows of a
manufacturer or vendor who supplies such a station.
Any help will be appreciated.
-Mark Bachman.
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Mark Bachman, Ph.D.
[email protected] / 949-824-6421 (-3732 fax)
Research Physicist, Microsystems Engineering
University of California at Irvine
