Talk to Jim Bustillo in Cory Hall, U. of Berkeley. He has a single wafer
XeF2 etcher.

Dr. Ken Macfarlane, Senior Electronics Engineer,
Development Dept., Logitech Ltd.,
Erskine Ferry Rd., Old Kilpatrick,
Glasgow G60 5EU, Scotland.
Voice: 01 389 804405 (direct dial)
Fax :  01 389  879042
Work: kmacf@logitech.uk.com
Home: kenmacfarlane@zetnet.co.uk


>-----Original Message-----
>From:  mbachman@uci.edu [SMTP:mbachman@uci.edu]
>Sent:  20 February 1999 02:24
>To:    MEMS@ISI.EDU
>Subject:       Supplier of XeF2 etching equipment?
>
>Dear MEMS group,
>
>We would like to do some Xenon Diflouride etching on silicon. Before we
>build an etching station from scratch, I wonder if anyone knows of a
>manufacturer or vendor who supplies such a station.
>
>Any help will be appreciated.
>
>-Mark Bachman.
>
>--------------------------------------------
>Mark Bachman, Ph.D.
>mbachman@uci.edu / 949-824-6421 (-3732 fax)
>Research Physicist, Microsystems Engineering
>University of California at Irvine
>
>
>