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MEMSnet Home: MEMS-Talk: Re: Pyrex-glas spatter
Re: Pyrex-glas spatter
1998-12-23
Roy Knechtel
Re: Pyrex-glas spatter
Roy Knechtel
1998-12-23
At 14:58 08.12.98 +0100, you wrote:
>Hallo!
>I want to spatter a Pyrex glas onto Si-wafer.
>I need the information about a technological process.
>Who can me help???
>
>

Hallo !

At the Fraunhofer Institute München there are possibilities for and
expiriemences in Pyrex sputtering. You can ask

Herrn Gerhard Klink ([email protected]) und Herrn Groß
Fraunhoferinstitute Festkörpertechnologie
Hansastraße 27 d
D-80686 München
Tel.: +49 (0)89 / 54759-296
Fax.: +49 (0)89 / 54759-100

for help.


Roy Knechtel
x-Fab GmbH ERFURT
Tel.: +49 (0) 361 / 420 53 - 28


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