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MEMSnet Home: MEMS-Talk: Non-elastic deformation of polysilicon
Non-elastic deformation of polysilicon
1999-01-24
Chua Bee Lee
Non-elastic deformation of polysilicon
Chua Bee Lee
1999-01-24
Hi !
        Can anyone give me some pointers on the non-elastic deformation of
polysilicon ? Does humidity comes into the picture ?

        Thanks!
        CHUA Bee Lee
        National University of Singapore
        Department of Mechanical and Production Engineering


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