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MEMSnet Home: MEMS-Talk: Re: How to measure the static friction coefficient between
Re: How to measure the static friction coefficient between
1999-02-18
Dr. Matthias Scherge
1999-02-18
Uthara Srinivasan
Re: How to measure the static friction coefficient between
Dr. Matthias Scherge
1999-02-18
              polisilicon layers?

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>Hello:
>How to measure the static friction coefficient between polysilicon
>layers?
>Thanks a lot.


By taking a micro tribometer, if low forces are under consideration.
Have a look at out web pages.

Best Regards,

Matt

Dr. Matthias Scherge
Microtribology Group
Technische Universitaet Ilmenau
PF 100565
D-98684 Ilmenau
Tel +49 3677 693782
Fax +49 3677 693771
ttp://imath.mathematik.tu-ilmenau.de/phys/personal/tribo.html


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