Try Polishing Corporation of America. Contact info is at their
webpage www.pcasilicon.com.

Hope this helps.

Xing Yang


>
>
> We're looking for a source to acquire 6-inch low-stress nitride coated
> silicon wafers.  Wafer size has to be 6 inch. The quantity we're looking at
> is a box of 25 wafers, and may be less depending on the pricing. Per wafer
> basis would be ideal. I'll compile a list of responses and post it to the
> group later.
>
> Barry Chen, Sr. Research Engineer
> ATMI
>
>
>
>