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MEMSnet Home: MEMS-Talk: Re: SU-8 Data
Re: SU-8 Data
1999-02-19
Marc O. Heuschkel
Re: SU-8 Data
Marc O. Heuschkel
1999-02-19
Dear researchers


It's a good idea to collect at one place all the known data about the
SU-8 photoresist. I'm working on microdevices for biological
measurements. In the project, in collaboration with neuroscientists
working in the domain of electrophysiology, we use to culture
biological cells on SU-8 and it seems that there is a good
biocompatibility of this material. I'm using the SU-8 photoepoxy as
passivation layer for measurement electrodes in the bottom part of a
cell culture chamber. You can find some informations on this topic at
this adress: http://dmtwww.epfl.ch/~mheuschk/


I'm also working on the realization of buried microchannels in SU-8.
Please find here a few references of publications on that topic you can
add to your data base.


1- L. Gu=E9rin, M. Bossel, M. Demierre, S. Calmes and P. Renaud, "Simple
and low cost fabrication of embedded microchannels by using a new
thick-film photoplastic", Proceedings of the 1997 International
Conference on Solid-State Sensors and Actuators, Transducers'97,
Chicago, USA, June 16-19, pp. 1419-1422


2- M. O. Heuschkel, L. Gu=E9rin, D. Bertrand and P. Renaud, "Buried
fluidic microchannels fabricated in polymer for bio-chip applications",
Nanotech '97, Montreux, Switzerland, November 17-21, 1997.


3- M. O. Heuschkel, L. Gu=E9rin, B. Buisson, D. Bertrand and P. Renaud,
"Buried microchannels in polymer for delivering of solutions to neurons
in a network", Sensors & Actuators: B. Chemical, Vol. 48/1-3, pp.
356-361.


4- P. Renaud, H. van Lintel, M. Heuschkel and L. Gu=E9rin, =B3Photo-polymer
microchannel technologies and applications=B2, 3rd International
Symposium on Micro-Total Analysis Systems =B5-TAS=B998, Banff, Alberta,
Canada, October 13-16, 1998, pp. 17-22


5- L. J. Gu=E9rin, A. Torosdagi, M. O. Heuschkel and P. Renaud,
=B3Microfluidic systems fabrication by lamination of photoplastic (SU8)
films=B2, Nanotech '98, Montreux, Switzerland, November 24-26, 1998.


Best regards,


Marc Heuschkel


EPFL

Institute of Microsystems

BM - Ecublens

CH-1015 Lausanne, Switzerland


Tel:    +41 21 693 66 39  (CET)

Fax:    +41 21 693 59 50

Email adress: =20
6666,3333,0000 [email protected]


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