"Fundamentals of Microfabrication" by Marc Madou is a pretty good general
reference to get you going on MEMS.
Jason Tauscher
Research Engineer
Silicon Designs Inc
www.silicondesigns.com
-----Original Message-----
From: Jean P. Van Wambeke [mailto:[email protected]]
Sent: Tuesday, February 16, 1999 8:34 AM
To: [email protected]
Subject: Intro to MEMs
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Content-Type: text/plain; charset="us-ascii"
Hello,
I just stumble across a few articles in the IEEE Proceedings and got totally
fascinated
with what I read about MEMs. I am new to the subject and would like to get
advice
on what books or publication I should look into for general and introduction
material. I am ME and was looking for some cool subject to do a
presentation
in my
Material Science class. So also anything related to exotic material would
be
helpful.
Thanks a lot.
Jean Pierre Van Wambeke
Mechanical Designer, Senior
Qualcomm Q-111B
6455 Lusk bvd
San Diego, CA 92121
voice: 619/658-1664
fax: 619/658-2112
e-mail: [email protected]
--=====================_1755058310==_.ALT
Content-Type: text/html; charset="us-ascii"
Hello,
I just stumble across a few articles in the IEEE Proceedings and got
totally fascinated
with what I read about MEMs. I am new to the subject and would
like to get advice
on what books or publication I should look into for general and
introduction
material. I am ME and was looking for some cool subject to do
a presentation in my
Material Science class. So also anything related to exotic
material would be helpful.
Thanks a lot.
Jean Pierre Van Wambeke
Mechanical Designer, Senior
Qualcomm Q-111B
6455 Lusk bvd
San Diego, CA 92121
voice:619/658-1664
fax:619/658-2112
e-mail: [email protected]
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