Normally it should not have any effect on adhesion if you spin it on oxide
or metal.  The siloxane bonds to the surface of Si and creates dangling
bonds which improve the whettability and adhesion of the resist.  However,
many times I've noticed that lithography results tended to be slightly
different.  I did not study it carefully as I was trying to get good molds.
  but this may happen because of changes in reflectivity of the surface.

Shekhar

At 08:48 AM 2/16/99 +0000, you wrote:
>Is HMDS useful as a resist adhesion promoter on substrates other than
>silicon? We use HMDS before applying resist to a gold coated wafer and I
>was wondering if this would have any benefit on gold-resist adhesion.
>
>Thanks,
>
>
>Todd
>
>
>
Shekhar Bhansali, Ph.D.
Center for Microelectronic Sensors and MEMS
Department of Electrical & Computer Engineering and Computer Science
University of Cincinnati
Cincinnati OH 45221-0030
Phone: (513) 556 0903  Fax: (513) 556 7326