> Hello,
> I'm looking for a method to produce circular membranes etched
> from Si. The membrane itself can be made of any material eg
> Si3N4 or SiO2 or Si itself. Can anyone help?
>
> Thanking you in advance
>
> Phil Rayner
>
>

DRIE (deep reactive ion etching) will do this

--
Dr. Kevin M. Walsh
Electrical Engineering Department, Speed Scientific School
University of Louisville, Louisville, KY 40292
(502) 852-0826

Internet address: [email protected]