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MEMSnet Home: MEMS-Talk: RE: nano vibrations in MEMS
RE: nano vibrations in MEMS
1999-02-21
De Boer, Maarten
RE: nano vibrations in MEMS
De Boer, Maarten
1999-02-21
Hi Matt,

   Your results sound interesting.  Do you have a write up I could look at?

Maarten

_____________________________________
Maarten de Boer, Ph. D.
Sandia National Laboratories, MS 1080
Intelligent Micromachining Systems, Dept. 1725
Albuquerque, NM  87185
mpdebo@sandia.gov
tel. (505) 844-9509
fax  (505) 844-2991

-----Original Message-----
From: Matthias.Scherge@physik.tu-ilmenau.de
[mailto:Matthias.Scherge@physik.tu-ilmenau.de]
Sent: Wednesday, February 17, 1999 2:00 AM
To: MEMS@ISI.EDU
Subject: nano vibrations in MEMS


Dear MEMS-Community:
We have measured friction  in the micronewton range as a function
of external vibration. The vibration was introduced perpendicular to
the direction of sliding with an amplitude ranging from 4 nm up to 2
microns.

The results could be very interesting for microtechnology, however,
we are struggling with the theoretical description.
Is anybody aware of publications or running projects in that field?
Any help is appreciated.
Best Regards,

  Matt Scherge

Dr. Matthias Scherge
Microtribology Group
Technische Universitaet Ilmenau
PF 100565
D-98684 Ilmenau
Tel +49 3677 693782
Fax +49 3677 693771
ttp://imath.mathematik.tu-ilmenau.de/phys/personal/tribo.html


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