Xu Jun,

This is an active research topic at CalTech.  Check out the research of
Michael Roukes.  He's actively working on this question.

Cary

On Mon, 22 Feb 1999, Xu Jun wrote:

>
> Hello!
>
> I want to know the following answers:
>   1. how to calculate Q factor in a capacitive microaccelerometer?
>   2. the higher Q factor,the better performance of device?
>
> regards
> xu jun
>
>
>
>
>