How deep, how wide, how long, how many?

>hi, Everybody:
>       I am trying to etch microchannel on glass (borosilicate glass,7740),
>but, lack of the support to do LPCVD poly-silicon on glass, the only
>subsitution
>I know is Cr/Au, but I really don't know if it can resist deept etching
>for me,
>about 320 mu m...
>       Besides, I don't know if amorphous silicon can resist to HF etching,
>I want to do deep etching, so I will use HF about 48% solution...
>       Any suggestions will be granted! I will appreciate..
>
>       Thanks a lot,
>       Sincerely
>
>Jerry Lee
>Insitute of Applied Mechanics
>email: [email protected] / [email protected]
>
>