Hi, John:
In fact, my microchannel is quite big... many undercut (isotropic)
need 400 mu deep (R), 700~800mu wide (2R)
for electrophoresis...
If any experiences to be share, I will appreciate it!
Thanks!
Sincerely,
____________________________________________
Jerry Lee
(Jia-Hong Lee)
Insitute of Applied Mechanics,
National Taiwan University
Taipei, Taiwan, ROC
e-mail:
[email protected][email protected]
"Try then error is better than no try"
>How deep, how wide, how long, how many?
>>I know is Cr/Au, but I really don't know if it can resist deept etching
>>about 320 mu m...