I am currently working with SU-8. I have been experiencing mask sticking
in vacuum contact on Karl Suzz. It apparently happens during the
exposure (I am not absolutely sure).  Even if I keep increasing the bake
it makes not much difference. Also after the PEB (post exposure bake) I
have never seen a wafer with SU-8 with no cracks. I was wondering if
anyone is experiencing what I am experiencing. My films are 10-40um
thick. I am using SU-8 5 and Su8- 25 provided by MCC. What ever soft
bake or PEB that I use I am unable to solve the cracking problems. My
process is along the guidelines provided by MCC. Any help on this would
be listed on the su8 FAQ.
Padmaja
([email protected])

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