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MEMSnet Home: MEMS-Talk: How to do lift-off on P(VDF-TrFE)?
How to do lift-off on P(VDF-TrFE)?
1999-02-26
xu
How to do lift-off on P(VDF-TrFE)?
xu
1999-02-26
Dear Professors and Collegues,

I am very urgent to know much information about the chemical properties of
P(VDF-TrFE) copolymers as I want to perform patterning upper electrode on
P(VDF-TrFE) films. I did some experiments, however P(VDF-TrFE) is easily
dissolved in acetone. So I believe there should be other chemical agent
which only dissolve photo-resist(e.g., OFPR) and is very difficult to
dissolve P(VDF-TrFE). We want to ake use of this film for developing a
new-type  ferroelectrc microbolometer based UFPAs. Accordingly, your reply
on this patterning technique will be highly appreciated.

with my best regards!

Yours sincerely,

Huaping(W-ping) XU
====================================================================
Huaping (W-ping) XU, Ph.D.
Postdoctoral Fellow of Japan Society for the Promotion of Science
Super-Eye Image Sensor Project
Osaka Prefecture Technological Research Institute
2-7-1 Ayumino, Izumi-shi
Osaka 594-1157
JAPAN
Tel: ++81-725-512534(O) Fax: ++81-725-530423(O)
E-mail: [email protected]
        [email protected]
Tel/Fax: ++81-725-443816(H)
Home address:
Rm.202, 6-14-14 Fuchuo-machi
Izumi, Osaka 594-0071
JAPAN


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