Hello, Mems..
      > My question is the alignment method of silicon(110) etching.
      > Using KOH wet etching, I want to get vertical groove.
      > The size is 100 nm width and 300 nm depth.
      > Please let me know.....
      > Thank you for reading my mail..
      > Sincerely yours.

    My E-mail address is   [email protected]
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