A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Re: poly-Si
Re: poly-Si
1995-05-26
Wood
1995-05-26
Shirley Kidner
Re: poly-Si
Wood
1995-05-26
Robert,

Surely the answer is 'it depends'. Polysilicon is a generic term applied

to a largely polycrystalline silicon structure (of variable and ill-defined
grain size) with various deliberate (e.g. doping) and unwanted (e.g. carrier
gas) additions. The mechanical and electrical properties will depend on
individual circumstances, purity of sources and equipment, method of
deposition, etc.

Dave Wood.

On Wed, 24 May 1995, robert s okojie ee stnt wrote:
> Dear colleagues,
>
> Please, could someone tell me what the Thermal Expansion Coeff. of
> Poly-Silicon is.
>
> References would also be appreciated.
>
> Thank you.
>
>
> Robert S. Okojie
> NJIT
>
>
>


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Addison Engineering
Process Variations in Microsystems Manufacturing
University Wafer
MEMS Technology Review