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MEMSnet Home: MEMS-Talk: MEMS: micro-mirror
MEMS: micro-mirror
1999-03-05
Rose Zhang
MEMS: micro-mirror
Rose Zhang
1999-03-05
Hello!

We are trying to design a micro-mirror with a deflection angle of 40 to 45
degree. However, if we use torsion hinge, the stress of the hinge at 45
degree exceeds the yield strength of most materials. I wonder whether you
have any suggestion about what materials and what hinge types are best
suitable for this kind of application.

Your help would be greatly appreciated.

Rose Zhang
Photonics Materials & Processes
Nationa Optics Institute
369 rue Franquet, Ste-Foy
Que, Canada
Tel: (418)657-7406x506
Fax:(418)657-7009


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