While your argument of "it depends" is entirely accurate, surely Mr. Okojie
could probably use whatever numbers you know of as an estimate, as that data on
polysilicon is rather hard to come by. Even a range of measured or calculated
values for the thermal expansion coef. for different grain sizes, doping
levels, etc. would be useful to know. remember the joke, 'first assume a
spherical horse'??? Or was that graduate level classical mechanics.....

Shirley Kidner
---------------Included Message---------------
Date: Fri, 26 May 1995 11:35:18 +0100 (BST)
From: Wood 
Subject: Re: poly-Si
To: MEMS@ISI.EDU

Robert,

Surely the answer is 'it depends'. Polysilicon is a generic term
applied to a largely polycrystalline silicon structure (of variable
and ill-defined grain size) with various deliberate (e.g. doping) and
unwanted (e.g. carrier gas) additions. The mechanical and electrical
properties will depend on individual circumstances, purity of sources
and equipment, method of deposition, etc.

Dave Wood.

On Wed, 24 May 1995, robert s okojie ee stnt wrote:

> Dear colleagues,

> Please, could someone tell me what the Thermal Expansion Coeff. of
> Poly-Silicon is.
>
> References would also be appreciated.
>
> Thank you.
>
>
> Robert S. Okojie
> NJIT
>
>
>
-------------------------------------
Shirley Kidner
05/26/95
12:51:31
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