A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: bonding: silicon wafer with alumina substrate
bonding: silicon wafer with alumina substrate
1999-03-07
stijn
bonding: silicon wafer with alumina substrate
stijn
1999-03-07
hello,

we are trying to bond a silicon wafer to an alumina substrate, but the
previous experiments were not a success. (we already tried with a
nitride intermediate layer (on low and on high temperature) and with an
undoped pyrox layer at low temperature)

Is there anybody who has some experience with the bonding topics or
somebody who's got usefull information? All information and tips are
welcome!

Thanx a lot.

Stijn
University KULeuven (belgium)


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Mentor Graphics Corporation
The Branford Group
MEMS Technology Review
Harrick Plasma, Inc.