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MEMSnet Home: MEMS-Talk: LPCVD oxide deposition
LPCVD oxide deposition
1999-03-08
Shekhar Bhansali
LPCVD oxide deposition
Shekhar Bhansali
1999-03-08
We would like to get low stress LPCVD oxide deposited on 4 2-inch
micromachined wafers.  I'd be happy to pay for the service.

I and my student have already tried to reach MCNC with no luck (We've left
plenty of voicemails but no one has returned the calls.....yet).

Thanks
Shekhar Bhansali, Ph.D.
Center for Microelectronic Sensors and MEMS
Department of Electrical & Computer Engineering and Computer Science
University of Cincinnati
Cincinnati OH 45221-0030
Phone: (513) 556 0903  Fax: (513) 556 7326


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