Hi dear mems community !

I'm actually working on a micro-manipulator, using adhesion forces. We use a
moncrystal silicon cantilever (600x140x10 microns) attached to a piezo
accelerator on one end and free on the other. We've got serious problems
defining with precision the dynamic behaviour of   the beam. We are actually
using a FEM on ABAQUS, which is really painfull in dynamic. Any information on
the subject will be VERY welcome.. Thanx




Sinan HALIYO

Laboratoire de Robotique de Paris
10-12 av. de l'Europe 78140 Velizy - FRANCE

tel : (33) 1 39.25.49.74
fax : (33) 1 39.25.49.67
mail: [email protected]