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MEMSnet Home: MEMS-Talk: Polysilicon - piezoresistive coefficients
Polysilicon - piezoresistive coefficients
1999-03-10
fabounp@yahoo.com
Polysilicon - piezoresistive coefficients
fabounp@yahoo.com
1999-03-10
I'm looking for the transverse and the longitudinal piezoresistive
coefficients in the case using polysilicon thin film .... Thanks ...




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