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MEMSnet Home: MEMS-Talk: Anodic bonding of pyrex 7740 on pyrex 7740.
Anodic bonding of pyrex 7740 on pyrex 7740.
1999-03-11
Yit-shun Leung Ki
Anodic bonding of pyrex 7740 on pyrex 7740.
Yit-shun Leung Ki
1999-03-11
Hi there,

Can any of you fill me in on anodic bonding techniques which can be
succesfully used to bond two py7740 wafers together? I need a method
which minimizes the gap between the pyrex parts (preferrably < 1 mu>.

Thanks!

Regards
--
Yit-shun Leung Ki
Graduate Student in Microfluidics
_______________________________________________________________
Institute of Microsystems (IMS)
Dept. of Microengineering,
Batîment BM,
Swiss Federal Inst. of Tech. (EPFL),    TEL: +41 21 693 7818
CH-1015 Lausanne                        FAX: +41 21 693 5950
Switzerland                             URL: dmtwww.epfl.ch/ims


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