Dear MEMS community,

We are currently looking for tools for silicon wet etching of 4" wafer in KOH
with a proteection of one (active) side of the wafer.

We need a highly reliable mechanical tool for our production line, with very low
induced mechanical stress.

Does anyone know a qualified supplier for such a tool?

Regards

Olivier LEFORT
Microsensor design manager
Sensor Unit
SEXTANT Avionique
Phone : 33 4 75 79 85 19
Fax : 33 4 75 79 86 06
olivier.lefort@sextant.thomson-csf.com